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Thermo Scientific™ SURF-CAL™ Particle Size Standards
Simplify the preparation of calibration wafers with these particle size standards.
$1470.00 - $1701.00
Specifications
| Additive | None |
|---|---|
| Content And Storage | Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. |
| Contents | Polystyrene microspheres in deionized, filtered water |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Catalog Number | Mfr. No. | Concentration | Diameter (Metric) | Price | Quantity & Availability | ||||
|---|---|---|---|---|---|---|---|---|---|
| Catalog Number | Mfr. No. | Concentration | Diameter (Metric) | Price | Quantity & Availability | ||||
|
09-980-138
|
Thermo Scientific™
PD047 |
3 x 108 particles/mL | 0.047 μm |
Each for $1,470.00
|
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|
09-980-139
|
Thermo Scientific™
PD047B |
1 x 10¹° particles/mL | 0.047 μm |
Each for $1,701.00
|
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|
09-980-140
|
Thermo Scientific™
PD064 |
3 x 108 particles/mL | 0.064 μm |
Each for $1,470.00
|
|
||||
|
09-980-141
|
Thermo Scientific™
PD064B |
1 x 10¹° particles/mL | 0.064 μm |
Each for $1,701.00
|
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|
09-980-146
|
Thermo Scientific™
PD083 |
3 x 108 particles/mL | 0.083 μm |
Each for $1,470.00
|
|
||||
|
09-980-147
|
Thermo Scientific™
PD083B |
1 x 10¹° particles/mL | 0.083 μm |
Each for $1,701.00
|
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||||
|
09-980-150
|
Thermo Scientific™
PD092 |
3 x 108 particles/mL | 0.092 μm |
Each for $1,470.00
|
|
||||
|
09-980-151
|
Thermo Scientific™
PD092B |
1 x 10¹° particles/mL | 0.092 μm |
Each for $1,701.00
|
|
||||
|
09-980-152
|
Thermo Scientific™
PD100 |
3 x 108 particles/mL | 0.100 μm |
Each for $1,470.00
|
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||||
|
09-980-153
|
Thermo Scientific™
PD100B |
1 x 10¹° particles/mL | 0.100 μm |
Each for $1,701.00
|
|
||||
|
09-980-178
|
Thermo Scientific™
PD1100 |
3 x 108 particles/mL | 1.112 μm |
Each for $1,470.00
|
|
||||
|
09-980-179
|
Thermo Scientific™
PD1100B |
1 x 10¹° particles/mL | 1.112 μm |
Each for $1,701.00
|
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||||
|
09-980-157
|
Thermo Scientific™
PD125B |
1 x 10¹° particles/mL | 0.126 μm |
Each for $1,701.00
|
|
||||
|
09-980-158
|
Thermo Scientific™
PD155 |
3 x 108 particles/mL | 0.155 μm |
Each for $1,470.00
|
|
||||
|
09-980-159
|
Thermo Scientific™
PD155B |
1 x 10¹° particles/mL | 0.155 μm |
Each for $1,701.00
|
|
||||
|
09-980-180
|
Thermo Scientific™
PD1600 |
3 x 108 particles/mL | 1.59 μm |
Each for $1,470.00
|
|
||||
|
09-980-162
|
Thermo Scientific™
PD200 |
3 x 108 particles/mL | 0.202 μm |
Each for $1,470.00
|
|
||||
|
09-980-181
|
Thermo Scientific™
PD2000 |
3 x 108 particles/mL | 2.01 μm |
Each for $1,470.00
|
|
||||
|
09-980-163
|
Thermo Scientific™
PD200B |
1 x 10¹° particles/mL | 0.202 μm |
Each for $1,701.00
|
|
||||
|
09-980-164
|
Thermo Scientific™
PD204 |
3 x 108 particles/mL | 0.204 μm |
Each for $1,470.00
|
|
||||
|
09-980-165
|
Thermo Scientific™
PD204B |
1 x 10¹° particles/mL | 0.204 μm |
Each for $1,701.00
|
|
||||
|
09-980-166
|
Thermo Scientific™
PD215 |
3 x 108 particles/mL | 0.220 μm |
Each for $1,470.00
|
|
||||
|
09-980-167
|
Thermo Scientific™
PD215B |
1 x 10¹° particles/mL | 0.220 μm |
Each for $1,701.00
|
|
||||
|
09-980-183
|
Thermo Scientific™
PD3000 |
3 x 108 particles/mL | 3.04 μm |
Each for $1,470.00
|
|
||||
|
09-980-168
|
Thermo Scientific™
PD305 |
3 x 108 particles/mL | 0.304 μm |
Each for $1,470.00
|
|
||||
|
09-980-169
|
Thermo Scientific™
PD305B |
1 x 10¹° particles/mL | 0.304 μm |
Each for $1,644.00
|
|
||||
|
09-980-170
|
Thermo Scientific™
PD365 |
3 x 108 particles/mL | 0.360 μm |
Each for $1,470.00
|
|
||||
|
09-980-171
|
Thermo Scientific™
PD365B |
1 x 10¹° particles/mL | 0.360 μm |
Each for $1,644.00
|
|
||||
|
09-980-172
|
Thermo Scientific™
PD500 |
3 x 108 particles/mL | 0.498 μm |
Each for $1,470.00
|
|
||||
|
09-980-173
|
Thermo Scientific™
PD500B |
1 x 10¹° particles/mL | 0.498 μm |
Each for $1,644.00
|
|
||||
|
09-980-174
|
Thermo Scientific™
PD800 |
3 x 108 particles/mL | 0.809 μm |
Each for $1,470.00
|
|
||||
|
09-980-175
|
Thermo Scientific™
PD800B |
1 x 10¹° particles/mL | 0.809 μm |
Each for $1,644.00
|
|
||||
|
09-980-176
|
Thermo Scientific™
PD802 |
3 x 108 particles/mL | 0.802 μm |
Each for $1,470.00
|
|
||||
|
09-980-177
|
Thermo Scientific™
PD802B |
1 x 10¹° particles/mL | 0.802 μm |
Each for $1,701.00
|
|
||||
Description
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Specifications
| None | |
| Polystyrene microspheres in deionized, filtered water | |
| Polystyrene | |
| Certificate of Calibration and Traceability to NIST | |
| 50 mL | |
| Product stable for a minimum of 12 months |
| Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. | |
| SSIS Calibration and Maintenance | |
| Size Standard Particles | |
| 1.05g/cm³ | |
| 1.59 at 589nm (25°C) |
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